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A
Tandem Accelerator (1.7 MV, 150 mA) is installed in EDI, which produces many
kinds of ion species such as H, He, B and Si. It has been used for various
diagnostics for characterization of materials including RBS (Rutherford
backscattering), ERDA (elastic recoil spectroscopic analysis), PIXE (particle
induced X-ray emission spectroscopy), high-energy ion implantation, and
channeling.
Rutherford back-scattering (RBS) spectrum obtained by Electrostatic Accelerator
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Last updated: July 1, 2004
Your questions are welcome at: kyokugen@etigo.nagaokaut.ac.jp |